US 12,278,120 B2
Substrate treatment device
Minami Nakamura, Yokohama (JP); and Kensuke Demura, Yokohama (JP)
Assigned to SHIBAURA MECHATRONICS CORPORATION, Kanagawa (JP)
Filed by SHIBAURA MECHATRONICS CORPORATION, Yokohama (JP)
Filed on Mar. 25, 2022, as Appl. No. 17/704,135.
Claims priority of application No. 2021-054611 (JP), filed on Mar. 29, 2021; and application No. 2022-006929 (JP), filed on Jan. 20, 2022.
Prior Publication US 2022/0310417 A1, Sep. 29, 2022
Int. Cl. H01L 21/67 (2006.01); H01L 21/687 (2006.01)
CPC H01L 21/67051 (2013.01) [H01L 21/67103 (2013.01); H01L 21/67248 (2013.01); H01L 21/67253 (2013.01); H01L 21/68764 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A substrate treatment device, comprising:
a placement platform configured to rotate a substrate;
a cooling part configured to supply a cooling gas to a space between the placement platform and the substrate;
a liquid supplier configured to supply a liquid to a surface of the substrate opposite to the placement platform side;
a detector above the surface of the substrate, the detector being configured to detect a start of freezing of the liquid; and
a controller configured to control a rotation of the substrate, a supply of the cooling gas, and a supply of the liquid, wherein
the controller is configured to control at least one of the rotation of the substrate, a flow rate of the cooling gas, or a supply rate of the liquid to cause the liquid on the surface of the substrate to reach a supercooled state,
the controller is configured to determine based on a signal from the detector that freezing of the liquid in the supercooled state has started, and the controller is configured to start thawing the frozen liquid after a prescribed interval has elapsed from the start of the freezing of the liquid,
the prescribed interval is predetermined, and
the prescribed interval is an interval from an instant at which the freezing of the liquid in the supercooled state starts until a temperature of a surface of the frozen liquid reaches a temperature of not less than 5° C. and not more than 10° C. greater than a temperature at which a crack occurs in the frozen liquid.