| CPC H01J 37/32091 (2013.01) [H01J 37/321 (2013.01); H01J 37/3211 (2013.01); H01J 37/32174 (2013.01); H01J 37/32183 (2013.01)] | 18 Claims |
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1. A plasma antenna comprising:
a first antenna configured to induce electromagnetic fields;
a second antenna configured to induce electromagnetic fields; and
a capacitor connected between an input terminal of the first antenna and an input terminal of the second antenna, the capacitor having a male end, the capacitor configured to be above the first antenna,
wherein the first antenna comprises a first RF feed having a pillar shape and a first coil connected to the first RF feed, the first RF feed having a female end configured to directly receive the male end of the capacitor, and
wherein the second antenna comprises a second RF feed having a hollow pillar shape surrounding the first RF feed and a second coil connected to the second RF feed,
wherein the capacitor includes,
a first conductor having a pillar shape, the first conductor coaxial with respect to the first RF feed, and
a second conductor having a hollow pillar shape surrounding the first conductor, the second conductor coaxial with respect to the second RF feed, and
wherein the capacitor is configured to be attached to the first and second antennas,
wherein the capacitor is configured to be attachable to or detachable from the first and second RF feed such that the male end couples the capacitor to the first RF feed, and the second conductor couples the capacitor to the second RF feed,
wherein the first RF feed has a cylindrical shape, and the second RF feed has a hollow cylindrical shape surrounding the cylindrical shape, and
wherein the first conductor, the first RF feed, the second conductor, the second RF feed, the male end, and the female end are coaxial with respect to each other.
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