US 12,278,085 B2
Hybrid scanning electron microscopy and acousto-optic based metrology
Guy Shwartz, Ramat-Gan (IL); Ori Golani, Ramat Gan (IL); Itamar Shani, Rehovot (IL); and Ido Almog, Rehovot (IL)
Assigned to APPLIED MATERIALS ISRAEL LTD., Rehovot (IL)
Filed by APPLIED MATERIALS ISRAEL LTD., Rehovot (IL)
Filed on Apr. 6, 2022, as Appl. No. 17/714,908.
Prior Publication US 2023/0326713 A1, Oct. 12, 2023
Int. Cl. H01J 37/28 (2006.01); G01N 23/2251 (2018.01); H01J 37/22 (2006.01); H01J 37/244 (2006.01)
CPC H01J 37/28 (2013.01) [G01N 23/2251 (2013.01); H01J 37/222 (2013.01); H01J 37/244 (2013.01); H01J 2237/226 (2013.01); H01J 2237/24475 (2013.01); H01J 2237/2448 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A computerized system for non-destructive hybrid acousto-optic and scanning electron microscopy based metrology, the system comprising a measurement setup and a computational module;
wherein the measurement setup comprises an acousto-optic setup and a scanning electron microscope (SEM);
wherein the acousto-optic setup comprises light generating equipment and a light detector and is configured to obtain acousto-optic measurement data of an inspected structure on a sample:
wherein the SEM is configured to obtain scanning electron microscopy measurement data of the inspected structure; and
wherein the computational module is configured to:
process the obtained measurement data to extract values of key measurement parameters corresponding to the acousto-optic measurement data and the scanning electron microscopy measurement data, respectively; and
obtain estimated values of one or more structural parameters of the inspected structure by executing an algorithm, which is configured to jointly process the extracted values to output estimated values of the one or more structural parameters.