US 12,278,083 B2
Substrate holder state detection device and substrate holder state detection method
Yuji Okita, Kyoto (JP); Hideji Naohara, Kyoto (JP); Hiroaki Kakuma, Kyoto (JP); Tatsuya Masui, Kyoto (JP); and Yuichi Deba, Kyoto (JP)
Assigned to SCREEN Holdings Co., Ltd., Kyoto (JP)
Filed by SCREEN Holdings Co., Ltd., Kyoto (JP)
Filed on May 20, 2022, as Appl. No. 17/749,638.
Claims priority of application No. 2021-114286 (JP), filed on Jul. 9, 2021.
Prior Publication US 2023/0009810 A1, Jan. 12, 2023
Int. Cl. G06T 7/00 (2017.01); G06T 7/73 (2017.01); H01J 37/20 (2006.01); H01J 37/22 (2006.01); H01J 37/317 (2006.01)
CPC H01J 37/222 (2013.01) [G06T 7/001 (2013.01); G06T 7/74 (2017.01); H01J 37/20 (2013.01); G06T 2207/30148 (2013.01); H01J 37/3171 (2013.01); H01J 2237/2007 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A state detection method comprising the steps of:
obtaining at least one image including a portion of at least one chuck pin for holding the substrate, as a reference image;
obtaining at least one image obtained by photographing at least a part of the chuck pin, as a target image;
performing matching processing between the reference image and the target image and calculating matching coordinates, which are coordinates indicating a position of the reference image in the target image when a matching score between the reference image and the target image is the highest; and
detecting an open/closed state of the chuck pin based on the matching coordinates,
wherein the reference image includes an image of the chuck pin in the open state, the closed state where the substrate is held, and the closed state where the substrate is not held, and
the chuck pin in the reference image is in any of the open state, the closed state where the chuck pin holds the substrate, and the closed state where the chuck pin does not hold the substrate.