US 12,276,924 B2
Reticle pod including motion limiting features and method of assembling same
Russ V. Raschke, Chanhassen, MN (US); and Brian Wiseman, Glencoe, MN (US)
Assigned to ENTEGRIS, INC., Billerica, MA (US)
Filed by ENTEGRIS, INC., Billerica, MA (US)
Filed on May 15, 2024, as Appl. No. 18/665,285.
Application 18/665,285 is a continuation of application No. 17/982,176, filed on Nov. 7, 2022, granted, now 12,013,648.
Claims priority of provisional application 63/277,188, filed on Nov. 9, 2021.
Prior Publication US 2024/0302757 A1, Sep. 12, 2024
Int. Cl. G03F 9/00 (2006.01); G03F 1/66 (2012.01)
CPC G03F 9/7011 (2013.01) [G03F 1/66 (2013.01)] 5 Claims
OG exemplary drawing
 
1. A reticle pod, comprising:
an inner pod including a baseplate and a cover, wherein:
the inner pod includes at least one gross alignment feature and a plurality of motion limiting features, each of the plurality of motion limiting features including:
a motion limiting pin extending from one of the cover or the baseplate; and
a motion limiting cup provided in the other of the cover or the baseplate,
wherein the motion limiting pin is configured to be contacted by a plurality of distinct surfaces of the motion limiting cup when the inner pod is assembled,
wherein the plurality of motion limiting features are configured such that when a force having a component parallel to a plane of the baseplate or the cover is applied to the inner pod, at least one of the plurality of motion limiting features provides resistance to the force prior to the at least one gross alignment feature providing resistance to the force.