US 12,276,918 B2
Method and apparatus for calculating a spatial map associated with a component
Mauritius Gerardus Elisabeth Schneiders, Eindhoven (NL); Koos Van Berkel, Waalre (NL); and Wenjie Jin, Eindhoven (NL)
Assigned to ASML Netherlands B.V., Veldhoven (NL)
Appl. No. 18/016,226
Filed by ASML Netherlands B.V., Veldhoven (NL)
PCT Filed Jun. 17, 2021, PCT No. PCT/EP2021/066369
§ 371(c)(1), (2) Date Jan. 13, 2023,
PCT Pub. No. WO2022/012844, PCT Pub. Date Jan. 20, 2022.
Claims priority of application No. 20186351 (EP), filed on Jul. 17, 2020.
Prior Publication US 2023/0273527 A1, Aug. 31, 2023
Int. Cl. G03F 7/00 (2006.01); G06F 17/12 (2006.01)
CPC G03F 7/70266 (2013.01) [G03F 7/70504 (2023.05); G03F 7/70508 (2013.01); G03F 7/706 (2013.01); G03F 7/706839 (2023.05); G03F 7/70891 (2013.01); G06F 17/12 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A method for calculating a spatial map associated with a component, the spatial map indicating spatial variations of thermal expansion parameters in the component, the method comprising:
providing or determining a temperature distribution in the component as a function of time; and
calculating the spatial map associated with the component using the provided or determined temperature distribution in the component and optical measurements of a radiation beam that has interacted directly or indirectly with the component, wherein the optical measurements are time synchronized with the provided or determined temperature distribution in the component.