a first polymer comprising a first repeating unit comprising a hydroxy-aryl group and a second repeating unit comprising an acid-labile group, wherein the first repeating unit is present in the first polymer in an amount from 30 to 50 mol %, based on total repeating units in the first polymer;

a second polymer comprising a first repeating unit comprising an acid-labile group, a second repeating unit comprising a lactone group, and a third repeating unit comprising a base-soluble group, wherein the base-soluble group has a pKa of less than or equal to 12, and wherein the base-soluble group does not comprise a hydroxy-aryl group;

a photoacid generator; and

a solvent,

wherein the first polymer and the second polymer are different from each other,

wherein the first polymer and the second polymer are present in a weight ratio from 1:2 to 1:4, and

wherein the second repeating unit of the first polymer is derived from a monomer of formula (2a′), (2b′), (2c′), (2d′), or (2e′):

R^c, R^d, and R^e are each independently hydrogen, fluorine, cyano, substituted or unsubstituted C_1-10 alkyl, or substituted or unsubstituted C_1-10 fluoroalkyl;

R¹ to R⁶ are each independently hydrogen, substituted or unsubstituted C_1-20 alkyl, substituted or unsubstituted C_3-20 cycloalkyl, substituted or unsubstituted C_3-20 heterocycloalkyl, substituted or unsubstituted C_2-20 alkenyl, substituted or unsubstituted C_3-20 cycloalkenyl, substituted or unsubstituted C_3-20 heterocycloalkenyl, substituted or unsubstituted C_6-20 aryl, or substituted or unsubstituted C_4-20 heteroaryl;

provided that only one of R¹ to R³ can be hydrogen and only one of R⁴ to R⁶ can be hydrogen;

any two of R¹ to R³ together optionally form a ring, and each of R¹ to R³ optionally may include as part of their structure one or more groups selected from —O—, —C(O)—, —N(R⁴²)—, —S—, or —S(O)₂—, wherein R⁴² is hydrogen, a straight chain or branched C_1-20 alkyl, monocyclic or polycyclic C_3-20 cycloalkyl, or monocyclic or polycyclic C_3-20 heterocycloalkyl;

any two of R⁴ to R⁶ together optionally form a ring, and each of R⁴ to R⁶ optionally may include as part of their structure one or more groups selected from —O—, —C(O)—, —N(R⁴³)—, —S—, or —S(O)₂—, wherein R⁴³ is hydrogen, a straight chain or branched C_1-20 alkyl, monocyclic or polycyclic C_3-20 cycloalkyl, or monocyclic or polycyclic C_3-20 heterocycloalkyl;

L² is a divalent linking;

R⁷ to R⁸ are each independently hydrogen, substituted or unsubstituted C_1-20 alkyl, substituted or unsubstituted C_3-20 cycloalkyl, substituted or unsubstituted C_3-20 heterocycloalkyl, substituted or unsubstituted C_6-20 aryl, or substituted or unsubstituted C_4-20 heteroaryl,

R⁹ is substituted or unsubstituted C_1-20 alkyl, substituted or unsubstituted C_3-20 cycloalkyl, or substituted or unsubstituted C_3-20 heterocycloalkyl, wherein one of R⁷ or R⁸ optionally forms a heterocyclic ring together with R⁹;

R¹⁰ to R¹² are each independently substituted or unsubstituted C_1-20 alkyl, substituted or unsubstituted C_3-20 cycloalkyl, substituted or unsubstituted C_3-20 heterocycloalkyl, substituted or unsubstituted C_6-20 aryl, or substituted or unsubstituted C_4-20 heteroaryl;

any two of R¹⁰ to R¹² together optionally form a ring, and each of R¹⁰ to R¹² optionally comprise as part of their structure one or more groups selected from —O—, —C(O)—, —N(R⁴⁴)—, —S—, or —S(O)₂—, wherein R⁴⁴ is hydrogen, straight chain or branched C_1-20 alkyl, monocyclic or polycyclic C_3-20 cycloalkyl, or monocyclic or polycyclic C_3-20 heterocycloalkyl;

X^a is a polymerizable group selected from norbornyl or vinyl;

n is 1; and

L³ is a single bond or a divalent linking group, provided that L³ is not a single bond when X^a is vinyl.