US 12,276,897 B2
Dynamic correction for an acousto-optic deflector
Itay Peled, Jerusalem (IL); and John Linden, Modiin (IL)
Assigned to Orbotech Ltd., Yavne (IL)
Filed by Orbotech Ltd., Yavne (IL)
Filed on Sep. 6, 2022, as Appl. No. 17/903,734.
Prior Publication US 2024/0094595 A1, Mar. 21, 2024
Int. Cl. G01J 1/42 (2006.01); G02F 1/33 (2006.01)
CPC G02F 1/33 (2013.01) [G01J 1/4257 (2013.01); G02F 2203/05 (2013.01)] 39 Claims
OG exemplary drawing
 
1. An optical scanner comprising:
a sampler to receive an optical beam and provide a sampled beam including a portion of the optical beam;
a dispersive element to spectrally disperse the sampled beam along a dispersion direction;
one or more detectors configured to receive at least a portion of the sampled beam dispersed along the dispersion direction;
one or more acousto-optic deflectors (AODs) configured to deflect the optical beam from the sampler; and
a controller communicatively coupled to at least the one or more AODs and the one or more detectors, the controller including one or more processors configured to execute program instructions causing the one or more processors to:
determine a center of mass of the sampled beam dispersed along the dispersion direction based on signals from at least one of the one or more detectors; and
generate a drive signal for at least one of the one or more AODs to deflect the optical beam from the sampler along a selected deflection angle based on the center of mass.