US 12,276,784 B2
Micromirror arrays
Luc Roger Simonne Haspeslagh, Linden (BE); Veronique Rochus, Leuven (BE); Guilherme Brondani Torri, Leuven (BE); Nitesh Pandey, Eindhoven (NL); and Sebastianus Adrianus Goorden, Eindhoven (NL)
Assigned to ASML Netherlands B.V., Veldhoven (NL); and IMEC v.Z.W., Leuven (BE)
Appl. No. 17/635,907
Filed by ASML Netherlands B.V., Veldhoven (NL); and IMEC v.z.w., Leuven (BE)
PCT Filed Aug. 5, 2020, PCT No. PCT/EP2020/072005
§ 371(c)(1), (2) Date Feb. 16, 2022,
PCT Pub. No. WO2021/032483, PCT Pub. Date Feb. 25, 2021.
Claims priority of application No. 19192311 (EP), filed on Aug. 19, 2019; and application No. 19199718 (EP), filed on Sep. 26, 2019.
Prior Publication US 2022/0283428 A1, Sep. 8, 2022
Int. Cl. G02B 26/08 (2006.01); G02B 7/18 (2021.01); G03F 7/00 (2006.01)
CPC G02B 26/0858 (2013.01) [G02B 7/1815 (2013.01); G03F 7/70116 (2013.01); G03F 7/70891 (2013.01)] 30 Claims
OG exemplary drawing
 
1. A micromirror array comprising:
a substrate;
a plurality of mirrors configured to reflect incident light;
for each mirror of the plurality of mirrors, at least one piezoelectric actuator connected to the substrate and configured to displace the mirror;
one or more pillars connecting the mirror to the at least one piezoelectric actuator;
for each mirror of the plurality of mirrors:
a heat diffuser configured to diffuse heat from the mirror, wherein the heat diffuser comprises a heat sink, and
a thermally conductive post configured to connect the heat sink to the mirror.