| CPC G01R 31/311 (2013.01) [G01Q 10/04 (2013.01); G01Q 20/02 (2013.01); G01Q 60/38 (2013.01)] | 20 Claims |
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1. An inspection tool comprising:
an optical thermal laser simulation unit configured to direct a laser beam to a surface of a device under test;
an atomic force probe unit for scanning the surface of the device under test, the atomic force probe unit comprising a detector unit for monitoring movements of a plurality of probes; and
a processor coupled to the optical thermal laser simulation unit, the atomic force probe unit, and detector unit, wherein the processor performs a fault location analysis and generates a map for a device under test.
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