US 12,276,679 B2
Coupling probe for micro device inspection
Gholamreza Chaji, Waterloo (CA); and Won Kyu Ha, Waterloo (CA)
Assigned to VueReal Inc., Waterloo (CA)
Appl. No. 17/910,600
Filed by VueReal Inc., Waterloo (CA)
PCT Filed Mar. 10, 2021, PCT No. PCT/CA2021/050318
§ 371(c)(1), (2) Date Sep. 9, 2022,
PCT Pub. No. WO2021/179077, PCT Pub. Date Sep. 16, 2021.
Claims priority of provisional application 62/987,586, filed on Mar. 10, 2020.
Prior Publication US 2023/0152349 A1, May 18, 2023
Int. Cl. G01R 1/073 (2006.01); G01R 1/067 (2006.01); G01R 31/265 (2006.01)
CPC G01R 1/07314 (2013.01) [G01R 1/06794 (2013.01); G01R 31/265 (2013.01)] 34 Claims
OG exemplary drawing
 
1. A coupling probe to measure cycles of a microdevice comprising:
an electrode made of a conductive layer covered by a dielectric to stimulate the microdevice;
a stimulating capacitor formed by the conductive layer, the dielectric and a microdevice pad;
a voltage stimulating source to stimulate the stimulating capacitor; and
a switch in series to control a biasing condition of the microdevice to turn the microdevice ON after a first active portion of a stimulating signal,
wherein a stimulating capacitor value which changes during a reset slope or an active portion of the time varying stimulating voltage signal to control the impact of each reset slope or active portion to keep the microdevice in a good biasing condition.