| CPC G01P 15/125 (2013.01) [G01P 15/02 (2013.01); G01P 15/0802 (2013.01); G01P 2015/0817 (2013.01)] | 11 Claims |
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1. An inertial sensor, comprising:
a substrate that is orthogonal to a Z axis when three axes orthogonal to one another are defined as an X axis, a Y axis, and the Z axis, and that is provided with a fixed electrode; and
a movable body that faces the fixed electrode in a Z-axis direction along the Z axis, that is orthogonal to the Z axis, that includes two flat surfaces having a front and back relationship with each other and a side surface connecting the two flat surfaces, and that is provided so as to be swingable with respect to the substrate around a swing axis along the X axis, wherein
in a plan view from the Z-axis direction along the Z axis, the movable body includes:
a first extension arranged at a predetermined angle with respect to the swing axis, and
a second extension arranged so that a side surface of the second extension opposes and faces a side surface of the first extension with an opening of the movable body disposed therebetween,
in the movable body, a supporter fixed to the substrate is provided, the supporter is arranged in the opening in the plan view from the Z-axis direction, and the supporter is coupled to the movable body by a coupler which spans the opening,
the first extension is arranged in the opening in the plan view from the Z-axis direction and extends radially from the supporter toward an outer edge of the movable body,
the second extension is a projection extending from a portion of the movable body defining an outer perimeter of the opening toward the supporter in the plan view from the Z-axis direction, and
only the opening is disposed between the side surface of the second extension and the side surface of the first extension such that the side surface of the second extension is configured to contact the side surface of the first extension along a length of the first extension and the second extension, respectively, and not at a terminus of the first extension and the second extension, to close, in parallel to an extension direction of the first extension and the second extension, at least a portion of the opening therebetween to restrict displacement of the movable body when a predetermined in-plane rotation is applied, the length of the first extension and the second extension extending along the extension direction, which extends from the portion of the movable body defining the outer perimeter of the opening toward the supporter in the plan view from the Z-axis direction.
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