US 12,276,673 B2
Vibration rectification error correction device, sensor module, and vibration rectification error correction method
Masayoshi Todorokihara, Suwa (JP)
Assigned to SEIKO EPSON CORPORATION, (JP)
Filed by SEIKO EPSON CORPORATION, Tokyo (JP)
Filed on Apr. 4, 2024, as Appl. No. 18/626,482.
Application 18/626,482 is a continuation of application No. 17/562,054, filed on Dec. 27, 2021, granted, now 11,988,685.
Claims priority of application No. 2020-219505 (JP), filed on Dec. 28, 2020.
Prior Publication US 2024/0255542 A1, Aug. 1, 2024
Int. Cl. G01P 15/00 (2006.01)
CPC G01P 15/00 (2013.01) 9 Claims
OG exemplary drawing
 
1. A vibration rectification error correction device comprising:
a reference signal generation circuit configured to output a reference signal;
a first frequency delta-sigma modulation circuit configured to perform frequency delta-sigma modulation on the reference signal by using a first measured signal to generate a first frequency delta-sigma modulated signal;
a first filter configured to:
receive the first count value as the output signal of the first frequency delta-sigma modulation circuit; and
filter the first count value in synchronization with the first measured signal to generate a second count value as an output signal of the first filter;
a first timing control circuit configured to:
receive the second count value, the reference signal, and the first measured signal;
generate a first timing signal based on a reference count value of the number of pulses of the reference signal; and
control a timing of outputting a second count value as an output signal in synchronization with the first timing signal;
a first latch circuit configured to:
latch the second count value as the output signal from the first timing control circuit; and
hold the latched second count value as a third count value; and
a second filter configured to:
receive the third count value as an output signal of the first latch circuit; and
filter the third count value in synchronization with the reference signal to generate a fourth count value as an output signal of the second filter.