US 12,276,623 B2
Foreign matter inspection device
Kunihiko Tsuchiya, Hamamatsu (JP); and Toshiyasu Suyama, Hamamatsu (JP)
Assigned to HAMAMATSU PHOTONICS K.K., Hamamatsu (JP)
Appl. No. 18/016,699
Filed by HAMAMATSU PHOTONICS K.K., Hamamatsu (JP)
PCT Filed Apr. 30, 2021, PCT No. PCT/JP2021/017259
§ 371(c)(1), (2) Date Jan. 18, 2023,
PCT Pub. No. WO2022/044430, PCT Pub. Date Mar. 3, 2022.
Claims priority of application No. 2020-142573 (JP), filed on Aug. 26, 2020.
Prior Publication US 2023/0288349 A1, Sep. 14, 2023
Int. Cl. G01N 23/18 (2018.01); G01N 21/33 (2006.01); G01N 21/3563 (2014.01); G01N 21/90 (2006.01); G01N 23/04 (2018.01); G01N 23/083 (2018.01)
CPC G01N 23/18 (2013.01) [G01N 21/33 (2013.01); G01N 21/3563 (2013.01); G01N 21/90 (2013.01); G01N 23/04 (2013.01); G01N 23/083 (2013.01); G01N 2223/643 (2013.01)] 12 Claims
OG exemplary drawing
 
1. A foreign matter inspection device configured to inspect whether foreign matter is included in an inspection object, the foreign matter inspection device comprising:
a carriage unit configured to carry the inspection object in a predetermined carrying direction;
an X-ray application unit configured to apply X-rays to the inspection object carried by the carriage unit;
an X-ray detection unit configured to detect X-rays transmitted by the inspection object and to output X-ray image data based on the detection result;
an infrared ray application unit configured to apply infrared rays to the inspection object carried by the carriage unit;
an infrared ray detection unit configured to detect infrared rays from the inspection object and to output infrared image data based on the detection result;
a protection unit formed of a member blocking X-rays and transmitting infrared rays and configured to cover the infrared ray application unit and the infrared ray detection unit; and
an image generating unit configured to generate an X-ray image of the inspection object based on the X-ray image data and to generate an infrared image of the inspection object based on the infrared image data,
wherein a window formed of a member blocking X-rays and transmitting infrared rays is provided on a part located on an optical path of an infrared ray from the infrared ray application unit and an infrared ray from the inspection object of the protection unit.