US 12,276,616 B2
Optical inspection apparatus, processing device, optical inspection method, and non-transitory storage medium storing optical inspection program
Hiroshi Ohno, Tokyo (JP)
Assigned to Kabushiki Kaisha Toshiba, Tokyo (JP)
Filed by KABUSHIKI KAISHA TOSHIBA, Tokyo (JP)
Filed on Aug. 30, 2022, as Appl. No. 17/899,496.
Claims priority of application No. 2022-045287 (JP), filed on Mar. 22, 2022.
Prior Publication US 2023/0324309 A1, Oct. 12, 2023
Int. Cl. G01N 21/88 (2006.01); G01B 11/30 (2006.01); H04N 23/72 (2023.01)
CPC G01N 21/8851 (2013.01) [G01B 11/306 (2013.01); G01N 21/8806 (2013.01); H04N 23/72 (2023.01); G01N 2201/068 (2013.01)] 12 Claims
OG exemplary drawing
 
1. An optical inspection apparatus comprising:
an imaging portion including an image sensor configured to capture a subject by reflected light from the subject, the reflected light occurring upon illuminating the subject;
a first wavelength selection portion provided on an optical axis of the imaging portion and configured to selectively pass one or more light components of the reflected light, the one or more light components having predetermined wavelengths;
an illumination portion configured to emit illumination light for illumination of the subject; and
a second wavelength selection portion provided on an optical axis of the illumination portion and configured to pass a plurality of light components of the illumination light complementarily to the first wavelength selection portion, the plurality of light components illuminating the subject and including the one or more light components having the predetermined wavelengths, wherein:
the first wavelength selection portion comprises:
a (1-1)th region configured to shield against light of a first wavelength and pass light of a second wavelength different from the first wavelength toward the image sensor; and
a (1-2)th region configured to pass the light of the first wavelength toward the image sensor and shield against the light of the second wavelength,
the second wavelength selection portion comprises:
a (2-1)th region having a shape similar to the (1-1)th region and configured to pass the light of the first wavelength toward the subject and shield against the light of the second wavelength; and
a (2-2)th region having a shape similar to the (1-2)th region and configured to pass the light of the second wavelength toward the subject and shield against the light of the first wavelength, and
the image sensor is configured to detect, in each pixel of the image sensor:
whether or not at least one of the one or more light components having the predetermined wavelengths is incident on the image sensor; or
a number of colors corresponding to the one or more light components having the predetermined wavelengths and being incident on the image sensor.