US 12,276,565 B2
Electrical test of optical components via metal-insulator-semiconductor capacitor structures
Xunyuan Zhang, Mechanicsburg, PA (US); Ravi S. Tummidi, Breinigsville, PA (US); Tony P. Polous, San Jose, CA (US); and Mark A Webster, Bethlehem, PA (US)
Assigned to Cisco Technology, Inc., San Jose, CA (US)
Filed by Cisco Technology, Inc., San Jose, CA (US)
Filed on Apr. 7, 2023, as Appl. No. 18/297,412.
Application 18/297,412 is a continuation of application No. 17/443,280, filed on Jul. 23, 2021, granted, now 11,686,648.
Prior Publication US 2023/0243718 A1, Aug. 3, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. G02B 6/12 (2006.01); G01M 11/00 (2006.01)
CPC G01M 11/30 (2013.01) [G02B 6/12007 (2013.01); G02B 2006/12061 (2013.01); G02B 2006/12145 (2013.01); G02B 2006/12164 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A system, including:
a plurality of optical devices including a first material embedded in a second material, wherein each optical device of the plurality of optical devices is associated with a different thickness range of a plurality of thickness ranges for the first material, and wherein the first material comprises a semiconductor material; and
a capacitive sensor, configured to:
measure a first capacitance at a first capacitance measurement point including the first material embedded in the second material and a second capacitance at a second capacitance measurement point including a region from which the first material has been replaced with the second material; and
select, based on the first capacitance and the second capacitance, a given optical device of the plurality of optical devices.