US 12,276,556 B2
Force sensor
Yoshikane Tanaami, Nagoya (JP); Miyuki Hayashi, Nagoya (JP); Yoshiaki Kanamori, Sendai (JP); and Taiyu Okatani, Sendai (JP)
Assigned to SINTOKOGIO, LTD., Aichi (JP); and TOHOKU UNIVERSITY, Miyagi (JP)
Filed by SINTOKOGIO, LTD., Nagoya (JP); and TOHOKU UNIVERSITY, Sendai (JP)
Filed on Feb. 14, 2023, as Appl. No. 18/168,862.
Claims priority of application No. 2022-027127 (JP), filed on Feb. 24, 2022.
Prior Publication US 2023/0266184 A1, Aug. 24, 2023
Int. Cl. G01L 1/24 (2006.01)
CPC G01L 1/24 (2013.01) 5 Claims
OG exemplary drawing
 
1. A force sensor comprising:
a first substrate having light transparency;
a metasurface pattern provided on a first principal surface of the first substrate;
a protective layer that has light transparency and that covers the metasurface pattern;
a second substrate provided so as to face the first substrate and including a second principal surface that faces the first principal surface;
a reflective layer provided on the second principal surface; and
a spacer defining a spacing between the first substrate and the second substrate.