US 12,276,274 B2
Fluid control device
Yutoku Kawabata, Kyoto (JP); and Nobuhira Tanaka, Kyoto (JP)
Assigned to Murata Manufacturing Co., Ltd., Kyoto (JP)
Filed by Murata Manufacturing Co., Ltd., Kyoto (JP)
Filed on Mar. 28, 2023, as Appl. No. 18/191,100.
Application 18/191,100 is a continuation of application No. PCT/JP2021/026240, filed on Jul. 13, 2021.
Claims priority of application No. 2020-164498 (JP), filed on Sep. 30, 2020.
Prior Publication US 2023/0235732 A1, Jul. 27, 2023
Int. Cl. F04B 45/047 (2006.01)
CPC F04B 45/047 (2013.01) 15 Claims
OG exemplary drawing
 
1. A fluid control device, comprising:
a housing, wherein a pump chamber is provided in the housing using a first main plate and a second main plate facing each other; and
a drive body disposed on the first main plate and configured to vibrate the first main plate,
wherein the first main plate includes a vibration portion, an outer frame portion, a support portion, and a first opening, the drive body being disposed on the vibration portion, and the vibration portion having a rotationally symmetric shape in plan view, the outer frame portion being positioned outside the vibration portion, the support portion connecting the vibration portion and the outer frame portion, and the first opening being surrounded by the vibration portion, the outer frame portion, and the support portion, and the pump chamber and an outside of the first main plate communicating with each other through the first opening,
wherein the second main plate includes a second opening, the pump chamber and an outside of the second main plate communicating with each other through the second opening, and the second opening having a rotationally symmetric shape in plan view,
wherein the second opening is arranged to overlap a center of the vibration portion of the first main plate in plan view and a center of the second main plate in plan view,
wherein an opening area of the second opening is from 10% to 75% of an area of the vibration portion,
wherein the vibration portion has a central portion including the center in plan view and a peripheral portion surrounding the central portion,
wherein the central portion is thicker than the peripheral portion,
wherein the central portion has a shape protruding to a side of the pump chamber relative to the peripheral portion, and
wherein the central portion is located within the second opening in plan view.