US 12,276,037 B2
Anodized titanium material and method for producing the same
Takehiko Muranaka, Yamaguchi (JP); Kouji Niimi, Yamaguchi (JP); Yuuta Ueno, Yamaguchi (JP); Hikaru Kikuchi, Miyagi (JP); Hideto Saito, Miyagi (JP); and Nobuyuki Nagayama, Miyagi (JP)
Assigned to YAMAGUCHI PREFECTURAL INDUSTRIAL TECHNOLOGY INSTITUTE, Yamaguchi (JP); SANWA INDUSTRY CO., LTD., Yamaguchi (JP); and TOKYO ELECTRON LIMITED, Tokyo (JP)
Filed by Yamaguchi Prefectural Industrial Technology Institute, Yamaguchi (JP); Sanwa Industry Co., Ltd., Yamaguchi (JP); and Tokyo Electron Limited, Tokyo (JP)
Filed on Feb. 8, 2021, as Appl. No. 17/169,593.
Application 17/169,593 is a continuation of application No. PCT/JP2019/031334, filed on Aug. 8, 2019.
Claims priority of application No. 2018-151769 (JP), filed on Aug. 10, 2018.
Prior Publication US 2021/0207283 A1, Jul. 8, 2021
Int. Cl. H01J 37/32 (2006.01); B32B 15/01 (2006.01); C25D 11/26 (2006.01); H01L 21/67 (2006.01); H01L 21/683 (2006.01)
CPC C25D 11/26 (2013.01) [B32B 15/01 (2013.01); H01J 37/3244 (2013.01); H01J 37/32715 (2013.01); H01L 21/67069 (2013.01); H01L 21/67103 (2013.01); H01L 21/6833 (2013.01); H01J 2237/002 (2013.01); H01J 2237/2007 (2013.01); H01J 2237/334 (2013.01)] 7 Claims
OG exemplary drawing
 
1. An anodized titanium material comprising:
a titanium base material; and
an anodized titanium layer provided on a surface of the titanium base material, wherein
the anodized titanium layer comprises
a porous first anodized titanium layer;
the anodized titanium layer has a withstand voltage at 25° C. of 500 V or more, a Vickers hardness of 200 or more, a film thickness of 20 μm or more and less than 80 μm, an arithmetic average roughness Ra of a surface of less than 1.6 μm, and a maximum height roughness Rz of the surface is less than 6.3 μm;
in a section perpendicular to a thickness direction of the first anodized titanium layer and in the surface of the first anodized titanium layer, no pore sections having a shape capable of including a circle having a diameter of 0.5 μm or more are observed; and
the first anodized titanium layer comprises a plurality of tubular pores extending in a direction intersecting the surface of the anodized titanium layer,
wherein the anodized titanium layer further comprises
a second anodized titanium layer provided between the titanium base material and the first anodized titanium layer; and
a fluorine content (unit: atomic %) in the second anodized titanium layer is lower than a fluorine content (unit: atomic %) in the first anodized titanium layer.