US 12,276,017 B2
Engineered multi-dimensional metallurgical properties in PVD materials
Scott P. Carpenter, Fremont, CA (US); Tianzong Xu, San Ramon, CA (US); and Harshal Surangalikar, San Jose, CA (US)
Assigned to VACTRONIX SCIENTIFIC, LLC, San Antonio, TX (US)
Filed by Vactronix Scientific LLC, Fremont, CA (US)
Filed on May 21, 2021, as Appl. No. 17/327,667.
Prior Publication US 2022/0372610 A1, Nov. 24, 2022
Int. Cl. C23C 14/16 (2006.01); C22C 14/00 (2006.01); C23C 14/02 (2006.01); C23C 14/34 (2006.01); C23C 14/50 (2006.01); C23C 14/54 (2006.01); C23C 14/58 (2006.01)
CPC C23C 14/165 (2013.01) [C22C 14/00 (2013.01); C23C 14/024 (2013.01); C23C 14/34 (2013.01); C23C 14/505 (2013.01); C23C 14/542 (2013.01); C23C 14/58 (2013.01); C22C 2200/00 (2013.01)] 25 Claims
OG exemplary drawing
 
1. A method of making a multi-layered metal material, comprising the steps of:
a. sputter depositing a first layer of a nickel-titanium alloy crystalline metal material having a crystal grain structure throughout the bulk of the first layer of crystalline metal material in which crystal grains are orthogonally oriented relative to an outer surface of the first layer of crystalline metal material;
b. interrupting the sputter deposition of the first layer of nickel-titanium alloy crystalline metal material; and
c. sputter depositing a second layer of nickel-titanium alloy crystalline metal material having a crystal grain structure throughout the bulk of the second layer of crystalline metal material in which crystal grains are orthogonally oriented relative to an interface bond region between the first layer of nickel-titanium alloy crystalline metal material and the second layer of crystalline metal material;
d. wherein the resulting multi-layered anisotropic metal material is characterized by having physical anisotropic properties.