US 12,275,748 B2
Amidinate compound, dimer compound thereof, thin-film forming raw material, and method of producing thin film
Tomoharu Yoshino, Tokyo (JP); Yoshiki Ooe, Tokyo (JP); Keisuke Takeda, Tokyo (JP); Ryota Fukushima, Tokyo (JP); Chiaki Mitsui, Tokyo (JP); and Atsushi Yamashita, Tokyo (JP)
Assigned to ADEKA CORPORATION, Tokyo (JP)
Appl. No. 17/917,671
Filed by ADEKA CORPORATION, Tokyo (JP)
PCT Filed Mar. 31, 2021, PCT No. PCT/JP2021/013898
§ 371(c)(1), (2) Date Oct. 7, 2022,
PCT Pub. No. WO2021/205958, PCT Pub. Date Oct. 14, 2021.
Claims priority of application No. 2020-070708 (JP), filed on Apr. 10, 2020.
Prior Publication US 2023/0151041 A1, May 18, 2023
Int. Cl. C07F 15/06 (2006.01); C01B 33/027 (2006.01); C07F 5/00 (2006.01); C07F 7/02 (2006.01); C07F 7/22 (2006.01); C07F 13/00 (2006.01); C07F 15/04 (2006.01); C23C 16/18 (2006.01); C23C 16/40 (2006.01); C23C 16/455 (2006.01)
CPC C07F 15/065 (2013.01) [C01B 33/027 (2013.01); C07F 7/2284 (2013.01); C23C 16/18 (2013.01); C23C 16/407 (2013.01); C23C 16/45553 (2013.01)] 3 Claims
 
1. An amidinate compound, which is represented by the following general formula (1), or a dimer compound thereof:

OG Complex Work Unit Chemistry
Wherein,
R1 represents a 2,2,2-trifluoroethyl group;
R2 represent an alkyl group having 1 to 5 carbon atoms;
R3 represents a hydrogen atom or an alkyl group having 1 to 5 carbon atoms;
M represents a copper atom, a cobalt atom, a nickel atom, a manganese atom, a zinc atom, a tin atom, an yttrium atom, an indium atom, a titanium atom, a gallium atom, or a silicon atom; and
“n” represents a valence of the atom represented by M.