US 12,275,084 B2
Dynamic beam deflection and shaping for laser process
Axel Heinrici, Kleinmachnow (DE); Paul Sonntag, Berlin (DE); Patrick Kühl, Berlin (DE); Rutger Wevers, Berlin (DE); and Matthias Waschicek, Wilmington, DE (US)
Assigned to II-VI DELAWARE, INC., Wilmington, DE (US)
Filed by II-VI Delaware, Inc, Wilmington, DE (US)
Filed on Jul. 22, 2021, as Appl. No. 17/382,647.
Application 17/382,647 is a continuation in part of application No. 17/001,920, filed on Aug. 25, 2020, granted, now 12,162,093.
Prior Publication US 2022/0063017 A1, Mar. 3, 2022
Int. Cl. B23K 26/06 (2014.01); B23K 26/082 (2014.01); B23K 26/26 (2014.01)
CPC B23K 26/0648 (2013.01) [B23K 26/082 (2015.10); B23K 26/26 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A laser processing system for directing a laser beam, from a laser source, along a laser machining path at a workpiece, the system comprising:
a collimator, including a plurality of lenses positioned along an optical axis from the laser source, configured to collimate the laser beam as a collimated laser beam having an exit beam diameter exiting the collimator, the plurality of lenses comprising:
a non-longitudinally movable lens that is movable non-longitudinally relative to the optical axis to deflect a focal point of the collimated laser beam orthogonal to the laser machining path; and
a tiltable lens that is tiltable about an axis transverse to the optical axis;
a sensor arrangement, including:
a partially reflective mirror, disposed within the collimated laser beam exiting the collimator, that reflects a portion of the collimated laser beam;
a sensor, outside of the collimated laser beam exiting the collimator and in optical communication with the partially reflective mirror, that measures a position of the collimated laser beam; and
a controller, in communication with the sensor arrangement, that controls movement of the tiltable lens about the axis transverse to the optical axis to direct the focal point of the collimated laser beam along the laser machining path.