US 12,275,079 B2
Method for separating a plurality of slices from workpieces by means of a wire saw during a sequence of separation processes
Peter Wiesner, Reut (DE); Wolfgang Gmach, Emmerting (DE); and Robert Kreuzeder, Wurmannsquick (DE)
Assigned to SILTRONIC AG, Munich (DE)
Appl. No. 18/008,185
Filed by Siltronic AG, Munich (DE)
PCT Filed May 20, 2021, PCT No. PCT/EP2021/063423
§ 371(c)(1), (2) Date Dec. 5, 2022,
PCT Pub. No. WO2021/249733, PCT Pub. Date Dec. 16, 2021.
Claims priority of application No. 20179145 (EP), filed on Jun. 10, 2020.
Prior Publication US 2023/0286067 A1, Sep. 14, 2023
Int. Cl. B23D 61/18 (2006.01); B23D 59/04 (2006.01); B28D 5/00 (2006.01); B28D 5/04 (2006.01)
CPC B23D 61/185 (2013.01) [B23D 59/04 (2013.01); B28D 5/0064 (2013.01); B28D 5/045 (2013.01)] 7 Claims
OG exemplary drawing
 
1. A method for cutting a multiplicity of slices, using a wire saw, from workpieces during a sequence of cut-off operations, which are divided into initial cuts and follow-on cuts, the wire saw comprising a wire array of moving wire sections of a saw wire and an actuating device, the wire array being tensioned in a plane between two wire guide rollers, each of the two wire guide rollers being supported between a fixed bearing and a floating bearing and comprising at least one chamber and a shell, which encloses a core of the wire guide roller and which is structured with guide grooves for the wire sections, the method comprising:
during each of the cut-off operations, feeding a respective workpiece of the workpieces, using the actuating device, through the wire array along a feed direction perpendicular to a workpiece axis and perpendicular to a plane of the wire array in the presence of a working fluid and hard materials, which act abrasively on the workpiece, the feeding the workpiece further comprising:
during each of the cut-off operations, feeding the workpiece through the wire array while simultaneously changing a length of the shell of each the two wire guide rollers by adjusting a temperature of the chamber of each of the wire guide rollers with a first cooling fluid in accordance with a specification of a first temperature profile, which specifies a temperature of the first cooling fluid in dependence on a depth of cut and which correlates with a first correction profile, which specifies a change in the length of the shell of each of the wire guide rollers in dependence on the depth of cut; and
while simultaneously axially moving the floating bearings of the two wire guide rollers by adjusting a temperature of the fixed bearings of the wire guide rollers with a second cooling fluid in accordance with the specification of a second temperature profile, which specifies a temperature of the second cooling fluid in dependence on the depth of cut and correlates with a second correction profile, which specifies a travel of the floating bearings in dependence on the depth of cut, wherein the first correction profile and the second correction profile are opposed to a shape deviation; and
determining the shape deviation before each of the cut-off operations, wherein the shape deviation is determined by comparing an average shape profile of already cut-off slices with a reference shape profile.