US 12,275,040 B2
Piezoelectric device and ultrasonic transducer
Seiji Umezawa, Nagaokakyo (JP); Shinsuke Ikeuchi, Nagaokakyo (JP); Fumiya Kurokawa, Nagaokakyo (JP); Nobuyoshi Adachi, Nagaokakyo (JP); and Masayuki Suzuki, Nagaokakyo (JP)
Assigned to MURATA MANUFACTURING CO., LTD., Kyoto (JP)
Filed by Murata Manufacturing Co., Ltd., Nagaokakyo (JP)
Filed on Oct. 22, 2021, as Appl. No. 17/507,845.
Application 17/507,845 is a continuation of application No. PCT/JP2020/015815, filed on Apr. 8, 2020.
Claims priority of application No. 2019-092681 (JP), filed on May 16, 2019; and application No. 2019-127482 (JP), filed on Jul. 9, 2019.
Prior Publication US 2022/0040736 A1, Feb. 10, 2022
Int. Cl. B06B 1/06 (2006.01)
CPC B06B 1/0666 (2013.01) 19 Claims
OG exemplary drawing
 
1. A piezoelectric device comprising:
a substrate including a first main surface and a second main surface opposite to the first main surface;
a piezoelectric element on the first main surface; and
a lid on the first main surface, covering the piezoelectric element, and being spaced apart from the piezoelectric element on the first main surface side; wherein
the piezoelectric element is on the first main surface, and includes a base portion with an annular outer shape in a view from a normal direction of the first main surface and a membrane portion at an inner side portion of the base portion in the view from the normal direction;
a first through hole extending from the first main surface to the second main surface is provided at a position facing the membrane portion in the substrate;
an annular electrode surrounds the first through hole on the second main surface in the view from the normal direction; and
the membrane portion includes a through slit.