US 11,957,038 B2
Mask assembly and deposition apparatus including the same
Areum Lee, Suwon-si (KR); Jeongkuk Kim, Suwon-si (KR); Hwi Kim, Suwon-si (KR); Seungyong Song, Suwon-si (KR); and Kyu Hwan Hwang, Seongnam-si (KR)
Assigned to SAMSUNG DISPLAY CO., LTD., Gyeonggi-Do (KR)
Filed by Samsung Display Co., Ltd., Yongin-Si (KR)
Filed on Apr. 30, 2021, as Appl. No. 17/245,512.
Claims priority of application No. 10-2020-0085284 (KR), filed on Jul. 10, 2020.
Prior Publication US 2022/0013725 A1, Jan. 13, 2022
Int. Cl. C23C 14/04 (2006.01); H10K 71/00 (2023.01); H10K 71/16 (2023.01); H10K 59/12 (2023.01)
CPC H10K 71/166 (2023.02) [C23C 14/042 (2013.01); H10K 71/00 (2023.02); H10K 71/164 (2023.02); H10K 59/12 (2023.02)] 20 Claims
OG exemplary drawing
 
1. A mask comprising:
a body unit including a deposition area through which a deposition opening is defined; and
protrusion units which only protrude from corners of the deposition area of the body unit, respectively, so that adjacent protrusion units of the protrusion units are spaced apart from each other and directly face to each other,
wherein pattern openings are defined in each of the protrusion units, and
a thickness of the body unit is greater than a thickness of a protrusion unit of the protrusion units.