US 11,956,863 B2
Multi-zone heater
Yutaka Unno, Handa (JP); and Nobuyuki Kondou, Chita-County (JP)
Assigned to NGK INSULATORS, LTD., Nagoya (JP)
Filed by NGK INSULATORS, LTD., Nagoya (JP)
Filed on Aug. 28, 2020, as Appl. No. 17/005,745.
Application 17/005,745 is a continuation of application No. PCT/JP2019/008815, filed on Mar. 6, 2019.
Claims priority of application No. 2018-055520 (JP), filed on Mar. 23, 2018.
Prior Publication US 2020/0396801 A1, Dec. 17, 2020
Int. Cl. H05B 3/26 (2006.01); C23C 16/46 (2006.01); C23C 16/50 (2006.01); H01J 37/32 (2006.01); H05B 1/02 (2006.01)
CPC H05B 3/265 (2013.01) [C23C 16/46 (2013.01); C23C 16/50 (2013.01); H01J 37/32522 (2013.01); H01J 2237/3321 (2013.01); H05B 1/0233 (2013.01); H05B 2203/002 (2013.01); H05B 2203/005 (2013.01); H05B 2203/016 (2013.01)] 8 Claims
OG exemplary drawing
 
1. A multi-zone heater, comprising:
a disc-shaped ceramic substrate that has a wafer placement surface;
a coil-shaped or mesh-shaped central zone heater provided in a central portion of the ceramic substrate;
at least one coil-shaped or mesh-shaped outer circumferential zone heater that is provided so as to correspond to at least one outer circumferential zone in an outer circumferential portion of the ceramic substrate in a same plane as a plane in which the central zone heater is disposed and that is routed throughout the at least one outer circumferential zone in a unicursal manner from one end portion to the other end portion in the at least one outer circumferential zone;
a first elemental wire portion that extends from a first terminal disposed in the central portion of the ceramic substrate, that passes through the central portion, that is connected to the one end portion of the at least one outer circumferential zone heater, and that has a meandering shape in plan view and a plurality of curved portions; and
a second elemental wire portion that extends from a second terminal disposed in the central portion of the ceramic substrate, that passes through the central portion, that is connected to the other end portion of the at least one outer circumferential zone heater, and that has a meandering shape in plan view and a plurality of curved portions,
wherein the first elemental wire portion and the second elemental wire portion are parallel to each other, and
a heat generation amount in a section with a small radius of curvature in curved portions of the first and the second elemental wire portions is greater than a heat generation amount in a section with a large radius of curvature in curved portions of the first and the second elemental wire portions.