|
1. A bulk acoustic wave resonator, comprising a substrate, and a bottom electrode, a piezoelectric layer and a top electrode which are sequentially stacked on the substrate, wherein an outline of an orthographic projection of the top electrode on the substrate is formed by four curves, which are end-to-end connected, arc transition is set at a joint of every two adjacent curves, and every two curves arranged in a spaced manner are not parallel, wherein connection points of every two adjacent curves are connected to form a quadrangle, four sides of the quadrangle are in one-to-one correspondence to the four curves, each curve comprises a plurality of sequentially-connected sub-curves, and distances between starting points of all the sub-curves and the corresponding sides of the starting points are different.
|
