US 11,955,510 B2
High-efficiency capacitor structure
Hyeokki Hong, Suwon-si (KR); Cheheung Kim, Yongin-si (KR); Sungchan Kang, Hwaseong-si (KR); Yongseop Yoon, Seoul (KR); and Choongho Rhee, Anyang-si (KR)
Assigned to SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR)
Filed by SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR)
Filed on Feb. 14, 2022, as Appl. No. 17/671,040.
Application 17/671,040 is a division of application No. 16/397,442, filed on Apr. 29, 2019, abandoned.
Claims priority of application No. 10-2018-0166408 (KR), filed on Dec. 20, 2018.
Prior Publication US 2022/0173210 A1, Jun. 2, 2022
Int. Cl. H01L 49/02 (2006.01)
CPC H01L 28/86 (2013.01) [H01L 28/91 (2013.01); H01L 28/60 (2013.01)] 4 Claims
OG exemplary drawing
 
1. A capacitor structure comprising:
a plurality of first layers and at least one second layer that are alternately stacked,
wherein each first layer of the plurality of first layers comprises first electrodes, second electrodes, third electrodes, and fourth electrodes alternately arranged in a first direction,
wherein the at least one second layer comprises fifth electrodes, sixth electrodes, seventh electrodes, and eighth electrodes alternately arranged in a second direction intersecting the first direction, the fifth electrodes being electrically connected to the first electrodes, the sixth electrodes being electrically connected to the second electrodes, the seventh electrodes being electrically connected to the third electrodes, and the eighth electrodes being electrically connected to the fourth electrodes,
wherein each of the first electrodes, the second electrodes, the third electrodes, and the fourth electrodes comprises a base portion and branch portions protruding from the base portion,
wherein the fifth electrodes, the sixth electrodes, the seventh electrodes, and the eighth electrodes are arranged side by side to correspond to the branch portions of the first electrodes, the second electrodes, the third electrodes, and the fourth electrodes,
wherein the fifth electrodes have a line shape extending in the first direction,
wherein the sixth electrodes have a line shape and are arranged in first regions corresponding to second regions in which the first electrodes and the second electrodes are provided,
wherein the eighth electrodes have a line shape and are arranged in third regions corresponding to fourth regions in which the first electrodes and the fourth electrodes are provided,
wherein the seventh electrodes have a line shape extending in the first direction, each of the seventh electrodes having a first width in a center region corresponding to the third electrodes and a second width in remaining regions of each of the seventh electrodes, the first width being wider than the second width,
wherein the at least one second layer is interposed between the plurality of first layers,
wherein the first electrodes are disposed on outer sides of each first layer of the plurality of first layers, and
wherein at least one third electrode of the third electrodes is disposed on an outer side of the at least one second layer.