US 11,955,504 B2
Microbolometer systems and methods
Eric A. Kurth, Santa Barbara, CA (US); Marin Sigurdson, Goleta, CA (US); and Robert F. Cannata, Santa Barbara, CA (US)
Assigned to Teledyne FLIR Commercial Systems, Inc., Goleta, CA (US)
Filed by TELEDYNE FLIR COMMERCIAL SYSTEMS, INC., Goleta, CA (US)
Filed on Sep. 10, 2021, as Appl. No. 17/471,158.
Application 17/471,158 is a continuation of application No. PCT/US2020/022194, filed on Mar. 11, 2020.
Claims priority of provisional application 62/907,555, filed on Sep. 28, 2019.
Claims priority of provisional application 62/907,548, filed on Sep. 27, 2019.
Claims priority of provisional application 62/816,889, filed on Mar. 11, 2019.
Prior Publication US 2021/0404878 A1, Dec. 30, 2021
Int. Cl. H01L 27/146 (2006.01); G01J 5/00 (2022.01); G01J 5/02 (2022.01); G01J 5/20 (2006.01); G01J 5/24 (2006.01); H04N 5/33 (2023.01); H04N 25/75 (2023.01)
CPC H01L 27/14669 (2013.01) [G01J 5/023 (2013.01); G01J 5/024 (2013.01); G01J 5/20 (2013.01); G01J 5/24 (2013.01); H01L 27/14636 (2013.01); H01L 27/14649 (2013.01); H01L 27/14683 (2013.01); H04N 5/33 (2013.01); H04N 25/75 (2023.01); G01J 2005/0077 (2013.01); G01J 2005/202 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An infrared imaging device comprising:
a substrate comprising a plurality of contacts and a surface, wherein the surface defines a plane;
a microbolometer array coupled to the substrate, wherein the microbolometer array comprises a plurality of microbolometers, and wherein each microbolometer comprises:
a bridge; and
a leg structure coupled to the bridge and to one of the plurality of contacts, wherein the leg structure comprises a cross-section having a first section, a second section substantially parallel to the first section, and a third section joining the first section and the second section.