US 11,955,497 B2
Image sensor
Junghyung Pyo, Seoul (KR); and Kyungho Lee, Suwon-si (KR)
Assigned to SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR)
Filed by Samsung Electronics Co., Ltd., Suwon-si (KR)
Filed on Apr. 7, 2021, as Appl. No. 17/224,655.
Application 17/224,655 is a continuation of application No. 16/566,943, filed on Sep. 11, 2019, granted, now 10,998,365.
Claims priority of application No. 10-2019-0011793 (KR), filed on Jan. 30, 2019.
Prior Publication US 2021/0225906 A1, Jul. 22, 2021
Int. Cl. H01L 27/146 (2006.01)
CPC H01L 27/1463 (2013.01) [H01L 27/14605 (2013.01); H01L 27/14627 (2013.01)] 13 Claims
OG exemplary drawing
 
1. An image sensor, comprising:
a pixel isolation structure disposed in pixel sensor array of a semiconductor substrate to define a first pixel region used to sense a first light, a second pixel region used to sense a second light, and a third pixel region used to sense a third light;
a first separation structure disposed in the first pixel region;
a second separation structure disposed in the second pixel region; and
a third separation structure disposed in the third pixel region;
wherein a wavelength of the second light is longer than a wavelength of the first light and is shorter than a wavelength of the third light,
wherein a shape of the first separation structure, a shape of the second separation structure, and a shape of the third separation structure are different from each other, and
wherein the pixel isolation structure comprises first protruding portions, which protrude toward a center of the third pixel region and face each other in a first direction perpendicular to a second direction.