US 11,955,442 B2
Semiconductor package and method
Jiun Yi Wu, Zhongli (TW); Chen-Hua Yu, Hsinchu (TW); and Chung-Shi Liu, Hsinchu (TW)
Assigned to Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu (TW)
Filed by Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu (TW)
Filed on Feb. 27, 2023, as Appl. No. 18/174,784.
Application 18/174,784 is a continuation of application No. 16/931,992, filed on Jul. 17, 2020, granted, now 11,594,498.
Claims priority of provisional application 63/015,759, filed on Apr. 27, 2020.
Prior Publication US 2023/0223359 A1, Jul. 13, 2023
Int. Cl. H01L 23/538 (2006.01); H01L 21/48 (2006.01); H01L 23/00 (2006.01); H01L 25/00 (2006.01); H01L 25/065 (2023.01)
CPC H01L 23/562 (2013.01) [H01L 21/4853 (2013.01); H01L 21/4857 (2013.01); H01L 23/5381 (2013.01); H01L 23/5383 (2013.01); H01L 23/5385 (2013.01); H01L 23/5386 (2013.01); H01L 24/16 (2013.01); H01L 25/0652 (2013.01); H01L 25/50 (2013.01); H01L 2224/16227 (2013.01); H01L 2225/06513 (2013.01); H01L 2225/06541 (2013.01); H01L 2924/1427 (2013.01); H01L 2924/1437 (2013.01); H01L 2924/19103 (2013.01); H01L 2924/3511 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A structure comprising:
a core substrate;
a redistribution structure coupled to a first side of the core substrate using first solder connectors, the redistribution structure comprising:
a plurality of redistribution layers, each of the plurality of redistribution layers comprising a dielectric layer and a metallization layer; and
a first local interconnect component embedded in a first redistribution layer of the plurality of redistribution layers, the first local interconnect component comprising a substrate, an interconnect structure on the substrate, and conductive connectors, the conductive connectors being bonded to a metallization layer of the first redistribution layer, the metallization layer of the first redistribution layer comprising first conductive lines and first conductive vias, the dielectric layer of the first redistribution layer encapsulating the first local interconnect component;
a first integrated circuit die coupled to the redistribution structure, the redistribution structure being interposed between the core substrate and the first integrated circuit die;
a second integrated circuit die coupled to the redistribution structure, the redistribution structure being interposed between the core substrate and the second integrated circuit die, the interconnect structure of the first local interconnect component electrically coupling the first integrated circuit die to the second integrated circuit die; and
second solder connectors coupled to a second side of the core substrate.