US 11,955,425 B2
Interconnect structure for logic circuit
Fang Chen, Hsinchu (TW); Jhon Jhy Liaw, Hsinchu County (TW); and Min-Chang Liang, Hsin-Chu County (TW)
Assigned to TAIWAN SEMICONDUCOTR MANUFACTURING CO., LTD., Hsinchu (TW)
Filed by Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu (TW)
Filed on Feb. 13, 2023, as Appl. No. 18/168,043.
Application 16/696,824 is a division of application No. 15/938,484, filed on Mar. 28, 2018, granted, now 10,916,498, issued on Feb. 9, 2021.
Application 18/168,043 is a continuation of application No. 16/696,824, filed on Nov. 26, 2019, granted, now 11,581,256.
Prior Publication US 2023/0197605 A1, Jun. 22, 2023
Int. Cl. H01L 23/522 (2006.01); G06F 30/39 (2020.01); H01L 21/768 (2006.01); H01L 23/528 (2006.01)
CPC H01L 23/5226 (2013.01) [G06F 30/39 (2020.01); H01L 21/76838 (2013.01); H01L 21/76897 (2013.01); H01L 23/5221 (2013.01); H01L 23/528 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method comprising:
forming a plurality of gate electrodes extending along a first direction, wherein the plurality of gate electrodes has a gate pitch (GP), wherein at least one of the plurality of gate electrodes is disposed over and engages a respective channel region and the at least one of the plurality of gate electrodes is disposed between respective source/drain regions; and
forming an interconnect structure over the plurality of gate electrodes, wherein the forming the interconnect structure includes:
forming odd-numbered interconnect routing layers oriented along a second direction that is substantially perpendicular to the first direction,
forming even-numbered interconnect routing layers oriented along a third direction that is substantially parallel to the first direction, wherein a first of the even-numbered interconnect routing layers has a first pitch (P2) and a third of the even-numbered interconnect routing layers has a second pitch (P6), and
configuring the first pitch and the second pitch, such that a ratio of the gate pitch to the first pitch to the second pitch (GP:P2:P6) is 3:2:4.