US 11,955,356 B2
Processing system and transfer method
Norihiko Amikura, Miyagi (JP); and Masatomo Kita, Miyagi (JP)
Assigned to TOKYO ELECTRON LIMITED, Tokyo (JP)
Filed by TOKYO ELECTRON LIMITED, Tokyo (JP)
Filed on Oct. 26, 2021, as Appl. No. 17/511,505.
Claims priority of application No. 2020-179160 (JP), filed on Oct. 26, 2020; and application No. 2021-148516 (JP), filed on Sep. 13, 2021.
Prior Publication US 2022/0130695 A1, Apr. 28, 2022
Int. Cl. H01L 21/67 (2006.01); H01L 21/677 (2006.01)
CPC H01L 21/67196 (2013.01) [H01L 21/67259 (2013.01); H01L 21/67742 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A processing system comprising:
a chamber in which a consumable member is installed;
a storage module configured to store the consumable member;
a position detection sensor located in the storage module and configured to detect a reference position of the consumable member, the reference position including position information corresponding to positioning of the consumable member in the chamber in which the consumable was positioned prior to transfer of the consumable member to the storage module;
a vacuum transfer module connected to the chamber and the storage module, the vacuum transfer module having a transfer robot configured to transfer the consumable member between the chamber and the storage module; and
a controller,
wherein the controller is configured to perform processes of:
(a) controlling the transfer robot to transfer the consumable member installed in the chamber to the storage module;
(b) detecting the reference position of the consumable member transferred to the storage module by the position detection sensor; and
(c) controlling the transfer robot to transfer a new consumable member different from the consumable member from the storage module to the chamber at a position adjusted based on the reference position of the consumable member detected in the process (b).