CPC H01L 21/67103 (2013.01) [H01L 21/67051 (2013.01); H10N 10/01 (2023.02)] | 6 Claims |
1. A temperature adjustment device comprising:
a flow path plate that includes a flow path groove;
a heat transfer plate that faces the flow path groove; and
a thermoelectric module plate that is connected to the heat transfer plate,
wherein a surface roughness of the flow path plate is 0.20 μm or more and 0.25 μm or less.
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