US 11,955,351 B2
Cooling water circulation system-integrated by-product collection apparatus
Seungyong Lee, Hwaseong-si (KR)
Assigned to J-SOLUTION CO., LTD., Yongin-si (KR)
Appl. No. 17/257,401
Filed by J-SOLUTION CO., LTD., Yongin-si (KR)
PCT Filed Dec. 2, 2020, PCT No. PCT/KR2020/017495
§ 371(c)(1), (2) Date Dec. 31, 2020,
PCT Pub. No. WO2021/112569, PCT Pub. Date Jun. 10, 2021.
Claims priority of application No. 10-2019-0161658 (KR), filed on Dec. 6, 2019.
Prior Publication US 2021/0366734 A1, Nov. 25, 2021
Int. Cl. B01D 53/22 (2006.01); H01L 21/67 (2006.01)
CPC H01L 21/67017 (2013.01) 12 Claims
OG exemplary drawing
 
1. A by-product collection apparatus which collects a by-product generated during a manufacturing process of manufacturing a semiconductor, the apparatus comprising:
a by-product collection module connected to a pipeline in series and configured to collect a by-product from a by-product gas, wherein the by-product gas flows in the pipeline having an inlet pipe and an outlet pipe provided at upper and lower portions of a first casing; and
a cooling water supply module including a cooling water tank and a cooling water pump in a second casing and configured to supply and recover cooling water to and from the by-product collection module through a cooling pipe,
wherein the cooling water supply module further includes a heat exchange member installed on a cooling water supply side of the by-product collection module, and
wherein the heat exchange member includes a thermoelectric plate in which a plurality of thermoelectric elements are arranged in a state in which a heat absorption surface and a heat emission surface face one side and the other side in a plan view, respectively, and a cooling tank attached to face the heat absorption surface of the thermoelectric plate so that the cooling water passes through the cooling tank before being supplied to the by-product collection module.