US 11,955,323 B2
Device for blocking plasma backflow in process chamber to protect air inlet structure
Na Li, Jiangsu (CN); Dongdong Hu, Jiangsu (CN); Xiaobo Liu, Jiangsu (CN); Haiyang Liu, Jiangsu (CN); Shiran Cheng, Jiangsu (CN); Song Guo, Jiangsu (CN); Zhihao Wu, Jiangsu (CN); and Kaidong Xu, Jiangsu (CN)
Assigned to JIANGSU LEUVEN INSTRUMENTS CO. LTD, Jiangsu (CN)
Appl. No. 17/628,224
Filed by JIANGSU LEUVEN INSTRUMENTS CO. LTD, Jiangsu (CN)
PCT Filed Feb. 29, 2020, PCT No. PCT/CN2020/077316
§ 371(c)(1), (2) Date Jan. 19, 2022,
PCT Pub. No. WO2021/134892, PCT Pub. Date Jul. 8, 2021.
Claims priority of application No. 201911413552.4 (CN), filed on Dec. 31, 2019.
Prior Publication US 2022/0254615 A1, Aug. 11, 2022
Int. Cl. H01J 37/32 (2006.01)
CPC H01J 37/32862 (2013.01) [H01J 37/3244 (2013.01); H01J 2237/335 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A device for blocking plasma backflow in a process chamber to protect an air inlet structure, comprising an air inlet nozzle connected to an air inlet flange, an inner cavity of the air inlet nozzle being provided with an air inlet guide body, wherein
the air inlet guide body has an upper structure, a middle structure, and a lower structure, where the upper structure, the middle structure, and the lower structure are an integrated structure and are in a shape of cylinder, and the upper structure has a cross-sectional diameter smaller than a cross-sectional diameter of the middle structure; and
a gas gathering area is arranged between the middle structure and the lower structure, and the middle structure and the lower structure are connected through the gas gathering area,
wherein at least one blind hole is arranged on an upper surface of the air inlet guide body, wherein the blind hole runs through an upper surface of the upper structure into an interior of the middle structure; and a lower end of the blind hole is in communication with one end of a radial hole;
wherein the radial hole is arranged on an upper-outer surface of the middle structure, and another end of the radial hole is in communication with an edge groove; and
the edge groove is arranged on outer side surfaces of the middle structure and lower structure.