| CPC H01J 37/32724 (2013.01) [C23C 16/4586 (2013.01); C23C 16/52 (2013.01); H01J 37/32082 (2013.01); H01L 21/6833 (2013.01); H01J 2237/3321 (2013.01)] | 4 Claims |
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1. A ceramic susceptor comprising:
an insulating plate on which a high-frequency electrode is disposed;
a shaft having one end connected to the insulating plate and having a separation plate at the other end;
a connection mount having an upper portion connected to the other end of the shaft;
a first rod and a second rod connected to the high-frequency electrode and extending into the connection mount through the separation plate at the other end of the shaft;
a connection member disposed in the connection mount and connecting the first rod and the second rod extending into the connection mount to a draw-in rod; and
a cooling structure configured to cool the connection mount;
wherein the connection mount comprises a fixing plate configured to fix the draw-in rod, the draw-in rod passes through the fixing plate and is exposed outside through the connection mount,
wherein the connection member includes a first hole and a second hole for fixing the first rod and the second rod to one side of the connection member, respectively, and a third hole for fixing the draw-in rod to the other side of the connection member,
wherein the first rod and the second rod are for branching of an electric current, and
wherein the fixing plate is provided in the inner space of the connection mount, and is spaced a predetermined distance from an upper part of the connection mount through which the first rod and the second rod pass, and a lower part of the connection mount through which the draw-in rod passes.
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