US 11,955,317 B2
Radio frequency match strap assembly
Ming-Sze Chen, Hsinchu (TW); Yu Li Wang, Hsinchu (TW); Yin-Tun Chou, Hsinchu (TW); Yuan-Hsin Chi, Longjing Township (TW); and Sheng-Yuan Lin, Hsinchu (TW)
Assigned to TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., Hsinchu (TW)
Filed by Taiwan Semiconductor Manufacturing Company, Hsinchu (TW)
Filed on Jan. 27, 2022, as Appl. No. 17/585,703.
Claims priority of provisional application 63/212,435, filed on Jun. 18, 2021.
Prior Publication US 2022/0406569 A1, Dec. 22, 2022
Int. Cl. H01J 37/32 (2006.01); C23C 16/505 (2006.01)
CPC H01J 37/32183 (2013.01) [C23C 16/505 (2013.01); H01J 2237/327 (2013.01); H01J 2237/3321 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A radio frequency (RF) match assembly for connecting RF power from an RF match unit to a process chamber, comprising:
a top electrically insulating column;
a bottom electrically insulating column; and
a one-piece RF match strap, the one-piece RF match strap having a head, a main body and a body extension, wherein the main body extends through the top fixed column and the bottom fixed column, and wherein a top of the one-piece RF match strap is configured to electrically contact an associated flexible chamber lid strap of the process chamber and a bottom of the one-piece RF match strap is configured to electrical connect with the RF match unit.