US 11,955,308 B1
Water cooled, air bearing based rotating anode x-ray illumination source
Michel Pharand, Los Gatos, CA (US)
Assigned to KLA Corporation, Milpitas, CA (US)
Filed by KLA Corporation, Milpitas, CA (US)
Filed on Sep. 22, 2022, as Appl. No. 17/950,768.
Int. Cl. H01J 35/10 (2006.01); F16C 33/10 (2006.01)
CPC H01J 35/106 (2013.01) [H01J 35/1017 (2019.05); H01J 35/104 (2019.05); F16C 33/107 (2013.01); H01J 2235/1026 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A high speed rotating anode system, comprising:
a rotary spindle shaft, a first end of the rotary spindle shaft configured to extend through an opening in a wall of a vacuum chamber;
a rotary platen coupled to the first end of the rotary spindle shaft, an anode material disposed on a surface of the rotary platen, the rotary platen configured to rotate within the vacuum chamber;
a counterweight configured to be attached to a second end of the rotary spindle shaft opposite the first end;
a first radial air bearing disposed around the rotary spindle shaft adjacent to the first end, the first radial air bearing configured to support a load in a direction perpendicular to a rotational axis of the rotary spindle shaft;
a second radial air bearing disposed around the rotary spindle shaft adjacent to the second end of the rotary spindle shaft, the second radial air bearing configured to support a load in the direction perpendicular to the rotational axis of the rotary spindle shaft;
a rotary motor disposed between the first and second radial air bearings, the rotary motor configured to apply a rotational torque to the rotary spindle shaft, the rotary motor including a rotor coupled to the rotary spindle shaft; and
a thrust bearing disposed between the first and second radial air bearings, the thrust bearing configured to support a load in a direction parallel to the rotational axis of the rotary spindle shaft.