US 11,955,271 B2
Radio frequency weak magnetic field detection sensor and method of manufacturing the same
Jang Yeol Kim, Daejeon (KR); In Kui Cho, Daejeon (KR); Hyunjoon Lee, Busan (KR); Sang-Won Kim, Daejeon (KR); Seong-Min Kim, Daejeon (KR); Jung Ick Moon, Daejeon (KR); Woo Cheon Park, Daejeon (KR); Je Hoon Yun, Daejeon (KR); Jaewoo Lee, Daejeon (KR); Ho Jin Lee, Daejeon (KR); Dong Won Jang, Daejeon (KR); Kibeom Kim, Chungju-si (KR); and Seungyoung Ahn, Daejeon (KR)
Assigned to ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE, Daejeon (KR); and KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY, Daejeon (KR)
Filed by ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE, Daejeon (KR); and Korea Advanced Institute of Science and Technology, Daejeon (KR)
Filed on May 23, 2023, as Appl. No. 18/200,759.
Application 18/200,759 is a division of application No. 17/189,788, filed on Mar. 2, 2021, granted, now 11,699,549.
Claims priority of application No. 10-2020-0027602 (KR), filed on Mar. 5, 2020.
Prior Publication US 2023/0290563 A1, Sep. 14, 2023
Int. Cl. H01F 27/32 (2006.01); G01R 33/02 (2006.01); H01F 27/24 (2006.01); H01F 27/28 (2006.01); H01F 41/04 (2006.01)
CPC H01F 27/325 (2013.01) [G01R 33/02 (2013.01); H01F 27/24 (2013.01); H01F 27/2804 (2013.01); H01F 41/041 (2013.01)] 4 Claims
OG exemplary drawing
 
1. A method of manufacturing a radio frequency (RF) weak magnetic field detection sensor, the method comprising:
forming a first substrate by patterning a portion of a pickup coil on one side surface thereof and engraving a core hole on another side surface thereof to accommodate a ferromagnetic core;
forming a second substrate by patterning another portion of the pickup coil, a core pad, and a coil pad on one side surface thereof; and
coupling the first substrate and the second substrate to each other by connecting the portion and the other portion of the pickup coil to each other, connecting the ferromagnetic core and the core pad to each other, and connecting the coil pad and the ferromagnetic core to each other by covering the first substrate on the one side surface of the second substrate so that the ferromagnetic core is accommodated in the core hole.