US 11,953,725 B2
Grating coupler and method of manufacturing the same
Feng-Wei Kuo, Zhudong Township (TW); Chewn-Pu Jou, Hsinchu (TW); and Hsing-Kuo Hsia, Jhubei (TW)
Assigned to Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu (TW)
Filed by Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu (TW)
Filed on Sep. 1, 2021, as Appl. No. 17/446,669.
Claims priority of provisional application 63/212,408, filed on Jun. 18, 2021.
Prior Publication US 2022/0404552 A1, Dec. 22, 2022
Int. Cl. G02B 6/12 (2006.01); G02B 6/124 (2006.01); G02B 6/132 (2006.01); H01S 5/026 (2006.01)
CPC G02B 6/12019 (2013.01) [G02B 6/124 (2013.01); G02B 6/132 (2013.01); H01S 5/026 (2013.01); G02B 2006/12121 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A device comprising:
a dielectric layer;
a plurality of grating structures arranged on the dielectric layer and separated from each other, the plurality of grating structures each comprising a bottom portion and top portion, the top portion having a first width and the bottom portion having a second width, the second width being larger than the first width, the plurality of grating structures being parallel to each other and arranged between a first waveguide portion and a second waveguide portion; and
a dielectric material between the plurality of grating structures and on top of the plurality of grating structures,
wherein:
each of the plurality of grating structures is separated from an adjacent one of the grating structures by a third width;
the first widths of ones of the plurality of grating structures close to the first waveguide portion are smaller than the first widths of ones of the plurality of prating structures close to the second waveguide portion;
the second widths of the ones of the plurality of grating structures close to the first waveguide portion are smaller than the second widths of the ones of the plurality of grating structures close to the second waveguide portion;
the third widths corresponding to the ones of the grating structures close to the first waveguide portion are larger than the third widths corresponding to the ones of the grating structures close to the second waveguide portion; and
sums of corresponding ones of the second widths and the third widths are uniform throughout the plurality of grating structures.