US 11,953,723 B2
Thermally tunable waveguide and photonic integrated circuit component having the same
Feng-Wei Kuo, Hsinchu County (TW); and Wen-Shiang Liao, Miaoli County (TW)
Assigned to Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu (TW)
Filed by Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu (TW)
Filed on Jan. 11, 2022, as Appl. No. 17/573,623.
Prior Publication US 2023/0221488 A1, Jul. 13, 2023
Int. Cl. G02B 6/12 (2006.01); G02B 6/293 (2006.01)
CPC G02B 6/12007 (2013.01) [G02B 2006/12142 (2013.01); G02B 6/29338 (2013.01); G02B 6/29352 (2013.01); G02B 6/29395 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A thermally tunable waveguide, comprising:
an optical waveguide comprising a phase shifter;
a heater disposed over the optical waveguide, the heater comprising:
a heating portion overlapping with the phase shifter of the optical waveguide;
pad portions disposed aside of the heating portion; and
tapered portions, each of the pad portions being connected to the heating portion through one of the tapered portions respectively.