US 11,953,568 B1
Wide-range perpendicular sensitive magnetic sensor and method for manufacturing the same
Peng Li, Guangzhou (CN); Qiancheng Lv, Guangzhou (CN); Bing Tian, Guangzhou (CN); Zejie Tan, Guangzhou (CN); Zhiming Wang, Guangzhou (CN); Jie Wei, Guangzhou (CN); Renze Chen, Guangzhou (CN); Xiaopeng Fan, Guangzhou (CN); Zhong Liu, Guangzhou (CN); Zhenheng Xu, Guangzhou (CN); Senjing Yao, Guangzhou (CN); Licheng Li, Guangzhou (CN); Yuehuan Lin, Guangzhou (CN); Shengrong Liu, Guangzhou (CN); Bofeng Luo, Guangzhou (CN); Jiaming Zhang, Guangzhou (CN); and Xu Yin, Guangzhou (CN)
Assigned to DIGITAL GRID RES. INST., CHINA SOUTHERN PWR. GRID, Guangzhou (CN)
Filed by DIGITAL GRID RES. INST., CHINA SOUTHERN PWR. GRID, Guangzhou (CN)
Filed on Sep. 6, 2023, as Appl. No. 18/242,624.
Claims priority of application No. 202211169132.8 (CN), filed on Sep. 23, 2022.
Int. Cl. G01R 33/09 (2006.01); H10N 35/00 (2023.01); H10N 35/01 (2023.01)
CPC G01R 33/098 (2013.01) [H10N 35/01 (2023.02); H10N 35/101 (2023.02)] 12 Claims
OG exemplary drawing
 
1. A wide-range perpendicular sensitive magnetic sensor, comprising:
a substrate;
a plurality of magnetic tunnel junctions;
a plurality of magnetic flux regulators;
a first output port; and
a second output port,
wherein the plurality of magnetic tunnel junctions are arranged on the substrate, the plurality of magnetic flux regulators are arranged above the plurality of magnetic tunnel junctions, the plurality of magnetic tunnel junctions include a first magnetic tunnel junction and a second magnetic tunnel junction, the first magnetic tunnel junction is located below the magnetic flux regulator, and the second magnetic tunnel junction is located below a gap between two adjacent magnetic flux regulators; the first magnetic tunnel junction and the second magnetic tunnel junction are arranged in partitions on the substrate;
wherein the first output port is connected to the first magnetic tunnel junction, the second output port is connected to the second magnetic tunnel junction, the first output port and the second output port are both configured to output a sensing signal representing a magnetic induction intensity of a magnetic field in a Z-axis direction, and the Z-axis direction is a direction perpendicular to the substrate; wherein a magnetic sensing direction of the first magnetic tunnel junction is a positive direction of the Z-axis, and a magnetic sensing direction of the second magnetic tunnel junction is a negative direction of the Z-axis; or the magnetic sensing direction of the first magnetic tunnel junction is the negative direction of the Z-axis, and the magnetic sensing direction of the second magnetic tunnel junction is the positive direction of the Z-axis;
wherein the magnetic sensor includes a voltage input port and a ground port;
wherein the first output port includes a first positive output port and a first negative output port, and the first output port is configured to output a voltage of the first magnetic tunnel junction; the voltage of the first magnetic tunnel junction being linearly related to magnetic reluctance of the first magnetic tunnel junction, and the magnetic reluctance of the first magnetic tunnel junction being linearly related to an external magnetic field; the first positive output port, the first negative output port, the voltage input port, the ground port and the first magnetic tunnel junction forming a first push-pull Wheatstone full-bridge structure; and
wherein the second output port includes a second positive output port and a second negative output port, and the second output port is configured to output a voltage of the second magnetic tunnel junction; the voltage of the second magnetic tunnel junction being linearly related to magnetic reluctance of the second magnetic tunnel junction, and the magnetic reluctance of the second magnetic tunnel junction being linearly related to the external magnetic field; the second positive output port, the second negative output port, the voltage input port, the ground port, and the second magnetic tunnel junction forming a second push-pull Wheatstone full-bridge structure.