US 11,953,567 B2
Magnetic multi-turn sensor and method of manufacture
Peter Meehan, Mungret (IE); Stephen O'Brien, Clarina (IE); Jochen Schmitt, Biedenkopf (DE); Michael W. Judy, Ipswich, MA (US); and Enno Lage, Kiel (DE)
Assigned to Analog Devices International Unlimited Company, Limerick (IE)
Filed by Analog Devices International Unlimited Company, Limerick (IE)
Filed on Aug. 25, 2021, as Appl. No. 17/412,046.
Claims priority of provisional application 63/075,453, filed on Sep. 8, 2020.
Prior Publication US 2022/0075010 A1, Mar. 10, 2022
Int. Cl. G01R 33/09 (2006.01); H01L 23/522 (2006.01); H01L 23/64 (2006.01); H10N 50/01 (2023.01); H10N 50/80 (2023.01); H10N 50/85 (2023.01)
CPC G01R 33/098 (2013.01) [G01R 33/093 (2013.01); H01L 23/5227 (2013.01); H01L 23/645 (2013.01); H10N 50/01 (2023.02); H10N 50/80 (2023.02); H10N 50/85 (2023.02)] 5 Claims
OG exemplary drawing
 
1. A magnetic multi-turn sensor, comprising:
a plurality of magnetoresistive sensor elements connected in series and arranged in a continuous spiral configuration; and
a substrate on which the plurality of magnetoresistive sensor elements are formed, the substrate comprising:
a trench configured to receive at least one magnetoresistive element; and
at least one bridge formed over the trench, the at least one bridge being formed by a portion of substrate and being configured to support at least one magnetoresistive element.