US 11,953,484 B2
Method for setting an airborne molecular contamination measurement station, and measurement station
Julien Bounouar, Annecy (FR); Olivier Le Barillec, Annecy (FR); and Nicolas Chapel, Sales (FR)
Assigned to PFEIFFER VACUUM, Annecy (FR)
Appl. No. 17/425,061
Filed by PFEIFFER VACUUM, Annecy (FR)
PCT Filed Jan. 22, 2020, PCT No. PCT/EP2020/051539
§ 371(c)(1), (2) Date Jul. 22, 2021,
PCT Pub. No. WO2020/160910, PCT Pub. Date Aug. 13, 2020.
Claims priority of application No. 1901091 (FR), filed on Feb. 5, 2019.
Prior Publication US 2022/0099646 A1, Mar. 31, 2022
Int. Cl. G01N 33/00 (2006.01); G01N 1/22 (2006.01); G01N 1/26 (2006.01); G05D 7/06 (2006.01)
CPC G01N 33/0075 (2013.01) [G01N 1/22 (2013.01); G01N 1/26 (2013.01); G05D 7/0658 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A setting method for setting conductances of controllable restrictions of an airborne molecular contamination measurement station, the measurement station includes at least one gas analyser, and at least two sampling lines which are connected to a common line which is connected to an inlet of the at least one gas analyser, each sampling line comprising a controllable restriction having a conductance that can be set between a minimum value and a maximum value, the setting method comprising:
an initial identification step, prior to carrying-out of an airborne molecular contamination measurement step, and during which a sampling line that has a lowest conductance when the conductance of the controllable restriction of the at least two sampling lines is set to its maximum value, is determined; and
an initial conductance-setting step prior to carrying-out of the measurement step and after the initial identification step, and during which the conductances of the controllable restrictions are set to make them correspond to the lowest conductance determined in the initial identification step.