US 11,953,417 B2
Oscillator apparatus
John D. Kim, Bridgewater, NJ (US); Flavio Pardo, Glen Gardner, NJ (US); and Sina Moradian, Orlando, FL (US)
Assigned to Nokia Technologies Oy, Espoo (FI)
Filed by Nokia Technologies Oy, Espoo (FI)
Filed on Sep. 28, 2021, as Appl. No. 17/487,256.
Claims priority of application No. 20199377 (EP), filed on Sep. 30, 2020.
Prior Publication US 2022/0099549 A1, Mar. 31, 2022
Int. Cl. G01N 15/06 (2006.01); H03B 5/32 (2006.01); H10N 30/87 (2023.01)
CPC G01N 15/0637 (2013.01) [H03B 5/32 (2013.01); H10N 30/87 (2023.02)] 19 Claims
OG exemplary drawing
 
1. An apparatus comprising,
a monolithic crystal comprising a substrate portion and at least one oscillator;
a first electrode provided at a first location of the oscillator;
a second electrode provided at a second location of the oscillator;
a gap separating the oscillator from the substrate portion, exposing a side surface of the oscillator; and
one or more tethers that extend across the gap so that the oscillator is supported by the substrate portion;
wherein the apparatus is configured to enable an analyte to enter the gap; and
wherein the side surface is functionalized to enable the analyte to accumulate on the side surface of the oscillator.