CPC G01L 9/0075 (2013.01) [G01L 1/142 (2013.01); G01L 7/082 (2013.01); G01L 9/0016 (2013.01); G01L 9/0042 (2013.01); G01L 9/0044 (2013.01); G01L 9/0047 (2013.01); G01L 9/0048 (2013.01); G01L 9/0072 (2013.01); G01L 9/0073 (2013.01); G01L 9/12 (2013.01); G01L 19/04 (2013.01); G01L 19/0618 (2013.01); G01L 19/14 (2013.01); G01L 19/147 (2013.01)] | 8 Claims |
1. A pressure sensor comprising:
a housing having an opening;
a membrane coupled to the housing at the opening, the membrane comprising a non-tensioned region bonded to the housing;
a tensioning plate positioned parallel to the membrane with a gap between the tensioning plate and the membrane; and
a bonding ring coupled between the membrane and the tensioning plate, the tensioning plate configured to apply a tensile force to the membrane through the bonding ring,
wherein the non-tensioned region is an area of the membrane outside the bonding ring,
wherein the membrane and the housing to which the membrane is coupled define a hermetically sealed cavity inside the housing; and
wherein the bonding ring comprises an adhesive and a plurality of spherical spacers, each of the plurality of spherical spacers having a single diameter, and each of the plurality of spherical spacers being an electrical insulator.
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