US 11,952,653 B2
Sputtering reaction chamber and process assembly of sputtering reaction chamber
Liren Han, Beijing (CN); Bing Li, Beijing (CN); Keke Zhao, Beijing (CN); Lixin Pei, Beijing (CN); and Guodong Bian, Beijing (CN)
Assigned to BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD., Beijing (CN)
Appl. No. 17/794,902
Filed by BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD., Beijing (CN)
PCT Filed Jan. 13, 2021, PCT No. PCT/CN2021/071461
§ 371(c)(1), (2) Date Jul. 22, 2022,
PCT Pub. No. WO2021/147724, PCT Pub. Date Jul. 29, 2021.
Claims priority of application No. 202010073789.9 (CN), filed on Jan. 22, 2020.
Prior Publication US 2023/0055006 A1, Feb. 23, 2023
Int. Cl. C23C 14/04 (2006.01); C23C 14/34 (2006.01); C23C 14/50 (2006.01); C23C 14/54 (2006.01)
CPC C23C 14/042 (2013.01) [C23C 14/34 (2013.01); C23C 14/50 (2013.01); C23C 14/541 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A process assembly of a sputtering reaction chamber comprising:
a liner including:
a body member being in a ring shape; and
a cover member integrally formed with the body member, extending from a bottom of the body member along a radial direction of the body member, and configured to fix a to-be-processed workpiece placed over a base when a process is performed, wherein:
a cooling channel is arranged in the cover member and the body member and includes a first cooling channel in the body member and a second cooling channel in the cover member, the first cooling channel communicating with the second cooling channel;
a deposition ring, wherein the cover member and the deposition ring cooperate with each other to form a labyrinth channel,
the deposition ring including:
a deposition member arranged radially with a bottom surface on top of the base and configured to contact with and support an outer edge of the to-be-processed workpiece,
a deposition-ring convex member arranged axially, and
a deposition-ring concave groove between the deposition-ring convex member and the deposition member;
wherein
the cover member includes a cover-member concave member in a ring shape corresponding to, and cooperating with, the deposition-ring convex member, and
the cover member further includes a cover-member convex member with an inner ring sidewall inserted into the deposition-ring concave groove to form the labyrinth channel.