US 11,952,471 B2
Ultrathin and stretchable polymer dielectric and its formation method
SungGap Im, Daejeon (KR); Juyeon Kang, Daejeon (KR); and Junhwan Choi, Daejeon (KR)
Assigned to Korea Advanced Institute of Science and Technology, Daejeon (KR)
Filed by Korea Advanced Institute of Science and Technology, Daejeon (KR)
Filed on Sep. 18, 2020, as Appl. No. 17/024,857.
Claims priority of application No. 10-2019-0115918 (KR), filed on Sep. 20, 2019; and application No. 10-2020-0038184 (KR), filed on Mar. 30, 2020.
Prior Publication US 2021/0087346 A1, Mar. 25, 2021
Int. Cl. C08J 5/18 (2006.01); B05D 1/00 (2006.01); C23C 14/06 (2006.01)
CPC C08J 5/18 (2013.01) [B05D 1/60 (2013.01); C08J 2333/08 (2013.01); C23C 14/06 (2013.01)] 5 Claims
OG exemplary drawing
 
1. A method of forming a polymer thin film, the method comprising:
providing an acrylate-based monomer and a vinyl group monomer for forming the polymer thin film, wherein the acrylate-based monomer comprises an aliphatic hydrocarbon chain having 8 or more carbons and a linear structure;
selecting a ratio of the acrylate-based monomer to the vinyl group monomer, wherein the ratio determines desired stretchability and dielectric properties of the polymer thin film; and
forming the polymer thin film by copolymerizing the acrylate-based monomer and the vinyl group monomer using said selected ratio and an initiated chemical vapor deposition (iCVD) method, wherein the polymer thin film has said desired stretchability and dielectric properties.