US 11,952,465 B2
Organoamino-functionalized linear and cyclic oligosiloxanes for deposition of silicon-containing films
Manchao Xiao, San Diego, CA (US); Matthew R. MacDonald, Laguna Niguel, CA (US); Xinjian Lei, Vista, CA (US); and Meiliang Wang, San Marcos, CA (US)
Assigned to VERSUM MATERIALS US, LLC, Tempe, AZ (US)
Filed by Versum Materials US, LLC, Tempe, AZ (US)
Filed on Sep. 29, 2020, as Appl. No. 17/036,193.
Application 17/036,193 is a division of application No. 15/883,815, filed on Jan. 30, 2018, granted, now 10,822,458.
Claims priority of provisional application 62/456,297, filed on Feb. 8, 2017.
Claims priority of provisional application 62/574,952, filed on Oct. 20, 2017.
Prior Publication US 2021/0017339 A1, Jan. 21, 2021
This patent is subject to a terminal disclaimer.
Int. Cl. C08G 77/26 (2006.01); C07F 7/10 (2006.01); C07F 7/18 (2006.01); C07F 7/21 (2006.01); C08G 77/04 (2006.01); C08G 77/06 (2006.01); C08L 83/08 (2006.01); C23C 16/40 (2006.01); C23C 16/455 (2006.01)
CPC C08G 77/26 (2013.01) [C07F 7/10 (2013.01); C07F 7/1888 (2013.01); C07F 7/21 (2013.01); C08G 77/045 (2013.01); C08G 77/06 (2013.01); C08L 83/08 (2013.01); C23C 16/401 (2013.01); C23C 16/45527 (2013.01); C23C 16/45553 (2013.01); C08G 2390/40 (2013.01)] 5 Claims
 
1. A method for making an organoamino-functionalized oligosiloxane compound selected from the group consisting of Formulae A and B:

OG Complex Work Unit Chemistry
the method comprising the steps of:
reacting a cyclotrisiloxane of Formula (i) or a cyclotetrasiloxane compound of Formula (iii) with an organoamine in the presence of a catalyst as shown in equations (1) or (3):

OG Complex Work Unit Chemistry
wherein
R1 is selected from a linear C1 to C10 alkyl group, a branched C3 to C10 alkyl group, a C3 to C10 cyclic alkyl group, a C3 to C10 heterocyclic group, a C3 to C10 alkenyl group, a C3 to C10 alkynyl group, and a C4 to C10 aryl group;
R2 is selected from the group consisting of hydrogen, a C1 to C10 linear alkyl group, a branched C3 to C10 alkyl group, a C3 to C10 cyclic alkyl group, a C3 to C10 heterocyclic group, a C3 to C10 alkenyl group, a C3 to C10 alkynyl group, and a C4 to C10 aryl group, wherein R1 and R2 are either linked to form a cyclic ring structure or are not linked to form a cyclic ring structure; and
R3-9 are each independently selected from hydrogen, a linear C1 to C10 alkyl group, a branched C3 to C10 alkyl group, a C3 to C10 cyclic alkyl group, a C2 to C10 alkenyl group, a C2 to C10 alkynyl group, and a C4 to C10 aryl group.